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IEC 62047-42 Ed. 1.0:2022 (en)
半導体素子-超小型電気機械素子-第42部:圧電MEMSカンチレバーの電気機械変換特性の測定法
Semiconductor devices - Micro-electromechanical devices - Part 42: Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever

発行年月日: 2022-09-16
状態: 有効
邦訳版: 無

規格概要
IEC 62047-42:2022 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film on microcantilever, which is typical structure of actual micro sensors and micro actuators. In order to obtain actual and precise piezoelectric coefficient of the piezoelectric thin films with microdevice structures, and this document reports the schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films on microcantilever fabricated by MEMS process.
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TC TC 47/SC 47F
ICS 31.080.99
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