NEWS TOPICS

会員向け情報

規格・書籍・物品

詳細検索する

IEC/TS 62607-6-5 Ed. 1.0:2022 (en)
ナノマニュファクチャリング-鍵管理特性-第6-5部:グラフェンベースの材料-接触抵抗とシート抵抗: 伝送線路測定
Nanomanufacturing - Key control characteristics - Part 6-5: Graphene-based materials - Contact and sheet resistance: transmission line measurement

発行年月日: 2022-12-14
状態: 有効
邦訳版: 無

規格概要
IEC TS 62607-6-5:2022(E) establishes a standardized method to determine the key control characteristics
  • contact resistance, and
  • sheet resistance
for graphene-based materials and other two-dimensional materials by a
  • transmission line measurement.
The method uses test structures applied to the 2D material by photolithographic methods consisting of several metal electrodes with increasing spacing between the electrodes. By a measurement of the voltage drop between different pairs of electrodes, sheet resistance and contact resistance can be calculated.
  • The method can be applied to any other two-dimensional materials which are subject to electrical metal contact on top of the materials.
  • The method provides accurate and reproducible results, if the electrical contact formed between the two-dimensional material and the metal electrodes provides ohmic contact property.
全文を表示する
TC TC 113
ICS 07.120
備考
LOADING...