IEC 62047-52 Ed. 1.0:2026 (en)
半導体素子－超小型電気機械素子－第52部：伸縮性MEMSの二軸引張試験方法
Semiconductor devices - Micro-electromechanical devices - Part 52: Biaxial tensile testing method for stretchable MEMS
発行年月日：
2026-03-04
状態：
有効
邦訳版：
無
英語 12ページ
18,040 円（税込） 本体価格：16,400円
- 規格概要
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IEC 62047-52:2026 specifies a testing method for measuring device performance and failure strain under biaxial tensile deformation in stretchable MEMS materials. The typical examples of the stretchable MEMS materials are flexible single crystalline silicon structures, MEMS circuit boards, interconnected MEMS on a stretchable substrate. The test piece has a cruciform geometry and the test piece thickness ranges from 1 m to 100 m with the same thickness as the actual devices. Since the failure strain can vary depending on loading conditions like uniaxial tension and equi-biaxial tension, a biaxial load is applied to a cruciform test piece with varying strain ratio between two perpendicular loading directions.全文を表示する
| TC |
TC 47/SC 47F |
|---|---|
| ICS |
31.080.99 |
| 備考 |
