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IEC 62047-49 Ed. 1.0:2025 (en)
半導体素子-超小型電気機械素子-第49部:圧電MEMSカンチレバーの温度および湿度試験方法
Semiconductor devices - Micro-electromechanical devices - Part 49: Temperature and humidity test methods for piezoelectric MEMS cantilevers

発行年月日: 2025-11-25
状態: 有効
邦訳版: 無

規格概要
IEC 62047-49:2025 specifies reliability test methods of electro-mechanical conversion characteristics of piezoelectric thin film on microcantilever, which is typical structure of micro sensors and micro actuators. In order to estimate the stability of the piezoelectric coefficient of the piezoelectric thin films with microscale structures in the operating conditions, this document reports the schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric MEMS devices. This document applies to piezoelectric thin films on microcantilever fabricated by MEMS process.
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TC TC 47/SC 47F
ICS 31.080.99
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