JEITA EDR-4712/600
Non-destructive recognition procedures of defects in Silicon Carbide Wafers (Part 6: The guideline for identifying and evaluating defects in Silicon Carbide Wafers using a combined method of optical inspection, photoluminescence and X-ray topography)
Date Published:
2026-04-30
Status:
Valid
Japanese:
Japanese 50pages
JPY 12,000 ( JPY 12,000excl. tax )
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| Corresponding Standards |
Explanation of Equivalency
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| Referenced JIS Stantards | |
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| Remarks |