JEITA EDR-4712/400
Non-destructive recognition procedures of defects in Silicon Carbide Wafers (Part 4: The guideline for identifying and evaluating defects in Silicon Carbide Wafers using a combined method of optical inspection and photoluminescence)
Date Published:
2020-12-01
Status:
Valid
Japanese:
Japanese 38pages
JPY 9,600 ( JPY 9,600excl. tax )
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- Standard Abstract
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This technical report is about the non-destructive recognition procedures of defects in silicon carbide wafers (Part 4: The guideline for identifying and evaluating defects in silicon carbide wafers using a combined method of optical inspection and photoluminescence).More
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