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JEITA EDR-4712/400
Non-destructive recognition procedures of defects in Silicon Carbide Wafers (Part 4: The guideline for identifying and evaluating defects in Silicon Carbide Wafers using a combined method of optical inspection and photoluminescence)

Date Published: 2020-12-01
Status: Valid
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Standard Abstract
This technical report is about the non-destructive recognition procedures of defects in silicon carbide wafers (Part 4: The guideline for identifying and evaluating defects in silicon carbide wafers using a combined method of optical inspection and photoluminescence).
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