JEITA EDR-4712/100
Non-destructive recognition procedures of defin Silicon Carbide Wafers (Part 1: Classification of defects)
Date Published:
2016-03-01
Status:
Valid
Japanese:
Japanese 30pages
JPY 8,000 ( JPY 8,000excl. tax )
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- Standard Abstract
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This technical report is about the non-destructive recognition procedures of defin silicon carbide wafers (Part 1: Classification of defects).More
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